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塗佈機

單機現況售價:整套出售 , 面議

廠牌:東芝機械
型號:SMF2424S Spin Coater
尺寸:
年分:2013
數量:1
備註:This spin coater is intended for HMDS processing and coat resist to the
mask substrate.
新機售價:整套NTD 112,000,000元

  • Path line : 1400 mm ±20 mm
  • Spin method : Cup rotation method
  • Cup size : φ1300 mm
  • Rotating speed : 30~1500 rpm
  • Rotation accuracy : ± 2 rpm
  • Rotational acceleration : 0~1500rpm / 5sec
  • Rotational deceleration : 1500~0rpm / 10sec
  • 3φ AC220V 60Hz