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雷射曝光機

單機現況售價:整套出售 , 面議

廠牌:東芝機械
型號:SDL-6262
尺寸:
年分:2013
數量:1
備註:新機售價:NTD 52,000,000元

  • Maximum rendering area : 600*600mm
  • Exposure method : Step and repeat method and scanning method
  • Reflection projection exposure using DMD
  • Minimum exposure line width : 3 μm
  • Exposure range : 1.024 × 0.768 mm
  • Light source : semiconductor laser
  • Wavelength : 405nm
  • Light source capacity : 10W
  • Illumination on exposure side : 10 W/cm2 or more
  • 三相,220V,60Hz

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